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Ultra shallow boron base profile with carbon implantation
Ultra shallow boron base profile with carbon implantation
2001
Petrus Hubertus Cornelis Magnee
A.L.A.M. Kemmeren
N. E. B. Cowern
Jan W. Slotboom
R.J. Havens
Hendrik G. A. Huizing
Keywords:
Chemistry
Boron
Inorganic chemistry
Bipolar junction transistor
Carbon
Heterostructure-emitter bipolar transistor
Correction
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