Soft X-ray microscopy in the spectral region of “carbon window” with the use of multilayer optics and a laser-plasma source

This paper reports on the fabrication and testing of multilayer mirrors for X-ray optical systems operating in the “carbon window” region (at wavelengths from 4.5 to 5.0 nm) and the results of their application in soft X-ray imaging of the internal structure of organic objects. The developed approaches to the fabrication and control of graded Co/C multilayer coatings have made it possible to create an X-ray multimirror system with a maximum known entrance aperture and throughput. The use of the developed high-spatial-resolution X-ray optics can significantly extend the field of practical application of soft X-ray absorption microscopy based on compact laser-plasma sources.