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A Study Of Microscopic Plasma-particle Interactions In glow Discharges
A Study Of Microscopic Plasma-particle Interactions In glow Discharges
1992
Seung J. Choi
H. W. Hwang
Mark J. Kushner
Keywords:
Particle
Glow discharge
Atomic physics
Plasma
Plasma cleaning
Physics
Electron
Microscopy
plasma density
plasma particle
Correction
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