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The impact and importance of line width roughness on sub-20nm nanostructures
The impact and importance of line width roughness on sub-20nm nanostructures
2012
Peter De Schepper
Efrain Altamirano-Sanchez
Alessandro Vaglio Pret
Werner Boullart
Stefan De Gendt
Keywords:
Surface finish
Nanostructure
Optics
Materials science
line width
Optoelectronics
Correction
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