Optimization of IBF parameters based on adaptive tool-path algorithm

As a kind of Computer Controlled Optical Surfacing(CCOS) technology. Ion Beam Figuring(IBF) has obvious advantages in the control of surface accuracy, surface roughness and subsurface damage. The superiority and characteristics of IBF in optical component processing are analyzed from the point of view of removal mechanism. For getting more effective and automatic tool path with the information of dwell time, a novel algorithm is proposed in this thesis. Based on the removal functions made through our IBF equipment and the adaptive tool-path, optimized parameters are obtained through analysis the residual error that would be created in the polishing process. A Φ600 mm plane reflector element was used to be a simulation instance. The simulation result shows that after four combinations of processing, the surface accuracy of PV (Peak Valley) value and the RMS (Root Mean Square) value was reduced to 4.81 nm and 0.495 nm from 110.22 nm and 13.998 nm respectively in the 98% aperture. The result shows that the algorithm and optimized parameters provide a good theoretical for high precision processing of IBF.