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Properties of a Ni-FUSI gate formed by the EBV method and one-step RTA
Properties of a Ni-FUSI gate formed by the EBV method and one-step RTA
2012
Zhang
Youwei
Xu
Dawei
Wan
Li
Wang
Zhongjian
Xia
Chao
Cheng
Xinhong
Yu
Yuehui
Keywords:
One-Step
Crystallography
Materials science
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