Old Web
English
Sign In
Acemap
>
Paper
>
Chapter 53. Strength and Weibull Characterization of Polysilicon Membranes for Mems Applications
Chapter 53. Strength and Weibull Characterization of Polysilicon Membranes for Mems Applications
2008
Osama M. Jadaan
Joseph Palko
Noel Nerneth
Anna Dubnisheva
Shuvo Roy
Aaron J. Fleischman
Keywords:
Microelectromechanical systems
Materials science
Membrane
Composite material
Weibull distribution
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]