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New Method to Form High-Quality Poly-Si Film by Selectively Enlarging Laser Crystallization
New Method to Form High-Quality Poly-Si Film by Selectively Enlarging Laser Crystallization
2003
Mitsuharu Tai
Mutsuko Hatano
Shinya Yamaguchi
Seong Kee Park
Takeshi Noda
Mikio Hongo
Takeo Shiba
Makoto Ohkura
Keywords:
Laser
Polycrystalline silicon
Pulsed laser
Composite material
Crystallization
Thin-film transistor
Materials science
laser crystallization
Correction
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