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Tensile behavior of amorphous alumina thin films deposited by plasma enhanced atomic layer deposition (PEALD)
Tensile behavior of amorphous alumina thin films deposited by plasma enhanced atomic layer deposition (PEALD)
2019
Jeong Hyun Woo
Na Hyang Kim
Sun-Young Park
Ju-Young Kim
Keywords:
tensile behavior
Atomic layer deposition
Amorphous solid
Plasma
Composite material
Thin film
Materials science
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