MEMS directional acoustic sensor with charge amplifier based electronic readout

MEMS acoustic sensors based on the operating principle of the Ormia ochracea fly provide a unique way to determine the direction of sound. A typical sensor consists of two wings coupled by a bridge and the entire mechanical structure attached to a substrate using two torsional legs. The sensor mechanical structure has two different vibration modes which can be coupled by placing their resonant frequencies close to each other. The acoustic wave impinging on the sensor induces displacements which are detected using comb finger capacitors at the edges of the wings. Previously, this has been accomplished using the universal capacitive readout MS3110, which is prone to static variations of the comb finger capacitors. In this work, a charge amplifier circuit was developed to independently measure the displacements of the wings under sound excitation. The ability to simultaneously read these displacements is needed to determine the bearing of sound using a single MEMS sensor, in contrast to previously reported works that needed either a calibrated microphone or a second MEMS sensor to determine the incident sound pressure level. Measurements showed that both the phase difference and amplitude difference of oscillating wings were strongly dependent on the incident angle of sound.MEMS acoustic sensors based on the operating principle of the Ormia ochracea fly provide a unique way to determine the direction of sound. A typical sensor consists of two wings coupled by a bridge and the entire mechanical structure attached to a substrate using two torsional legs. The sensor mechanical structure has two different vibration modes which can be coupled by placing their resonant frequencies close to each other. The acoustic wave impinging on the sensor induces displacements which are detected using comb finger capacitors at the edges of the wings. Previously, this has been accomplished using the universal capacitive readout MS3110, which is prone to static variations of the comb finger capacitors. In this work, a charge amplifier circuit was developed to independently measure the displacements of the wings under sound excitation. The ability to simultaneously read these displacements is needed to determine the bearing of sound using a single MEMS sensor, in contrast to previously reported w...