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Synchronous Plasma Pulsing for Etch Applications
Synchronous Plasma Pulsing for Etch Applications
2019
M. Haass
Maxime Darnon
Erwine Pargon
Camille Petit-Etienne
Laurent Vallier
P. Bodart
Gilles Cunge
Samer Banna
Thorsten Lill
Olivier Joubert
Keywords:
Plasma
Materials science
Optoelectronics
Correction
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