Millimeter-wave three-state tunable stopband resonator based on integrated MEMS

This paper presents a fully integrated MEMS-based tunable stopband resonator. Two MEMS available in a SiGe BiCMOS technology are implemented to modify the electrical length of a microstrip stub that targets three center frequencies which are 60 GHz, 77 GHz, and 94 GHz. The agreement between the electromagnetic simulations and the measurement results is very good, proving the high reliability of the technology.