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Improving the Performance of Deep Recessed Anode AlGaN/GaN Schottky Barrier Diode by Post Etching Treatment
Improving the Performance of Deep Recessed Anode AlGaN/GaN Schottky Barrier Diode by Post Etching Treatment
2021
Kai Liu
Chong Wang
Xue-Feng Zheng
Xiaohua Ma
Yaopeng Zhao
Ang Li
Yunlong He
Wei Mao
Yue Hao
Keywords:
Schottky diode
Anode
Materials science
Etching
algan gan
Optoelectronics
Correction
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