Surface ablation of RbTiOPO4 by femtosecond laser

Abstract We report here the results obtained in surface ablation of RbTiOPO 4 single crystals by femtosecond laser. We fabricated and characterized one-dimensional (1D) diffraction gratings with different lattice spacings of 15 and 20 μm, and with a sub-modulation of the period introduced in the later. The optical and electronic microscopy characterization and filling factor analysis of these diffraction gratings are reported. We also show that the roughness generated on the grooves by the ablation process can be improved by chemical etching.