Apparatus and method for plasma coating a substrate, particularly a pressing plate

2012 
It is a device (100..103) for plasma coating a substrate (2), particularly a pressing plate specified, comprising a vacuum chamber (3) and an electrode disposed therein (400..409), which is segmented, wherein each of the electrode segments (500..512) has its own connection (6) for an electrical energy source (700..702). Furthermore, a method for operating said device (100 .. 103) is given, in which a substrate to be coated (2) with respect to said electrode (400..409) is positioned, and at least one an electrode segment (500..512) associated power source (700..706) is activated. In addition, a gas is introduced, which causes a plasma-enhanced chemical vapor deposition on the substrate (2).
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