A 3D Printing Route to Fabrication of ZrCuSi Alloy Target for ZrCuSiN Nanocomposite Thin Films

Abstract The present study demonstrates a simple and robust strategy for fabricating nanocomposite thin films with high quality using a multi-component ZrCuSi single target. The ZrCuSi target was produced by using computer numerical control (CNC) based direct energy deposition (i.e., 3D printing). The influence of the energy density on morphological features and porosity of the ZrCuSi target surface was closely examined at a certain range of the energy density (75–225 J/mm3). X-ray diffractometer (XRD) and scanning electron microscopy (SEM) were applied for confirming the presence of the preferable crystallographic orientation and elucidating the morphological features of the nanocomposite target. In addition, functional nanocomposite thin films deposited from the ZrCuSi target presented in the current study were characterized. A scratch test and field-emission SEM (FE-SEM) revealed the adhesion properties and the morphological features of the nanocomposite coatings. Therefore, this work is highly expected to provide a facile and robust way to fabrication of e multi-component functional targets based ZrN, thereby envisioning usefulness of the nanocomposite coatings for automotive engine parts and various other wear protection applications.