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Dopant Activation, Carrier Mobility, and TEM Studies in Polycrystalline Silicon Films
Dopant Activation, Carrier Mobility, and TEM Studies in Polycrystalline Silicon Films
1990
G. Queirolo
E. Servida
L. Baldi
G. Pignatel
A. Armigliato
Stefano Frabboni
Franco Corticelli
Keywords:
Electron mobility
Polycrystalline silicon
Dopant Activation
Nanocrystalline silicon
Monocrystalline silicon
Inorganic chemistry
Chemistry
Analytical chemistry
Optoelectronics
Transmission electron microscopy
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