Wavelength dispersive μPIXE setup for the ion microprobe

We have developed a small wavelength dispersive X-ray spectrometer to explore the possibility of performing chemical speciation on microscopic samples utilizing focused ion beams available at the Rudjer Boskovic Institute ion microprobe. Although PIXE spectra are in principle chemically invariant, small influence of chemical effects could be observed even with Si(Li) or SDD detectors. Such chemical effects can be clearly seen with high resolution crystal X-ray spectrometers having energy resolution of several eV. A dedicated vacuum chamber, housing the diffraction crystal, sample holder and CCD X-ray detector, was constructed and positioned behind the main ion microprobe vacuum chamber. Here we will briefly describe the spectrometer, and illustrate its capabilities on measured K X-ray spectra of selected sulfur compounds. We will also demonstrate its abilities to resolve K and M X-ray lines irresolvable by solid state ED detectors usually used in PIXE.