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Electron beam-generated ion-ion plasmas: Etching and diagnostics
Electron beam-generated ion-ion plasmas: Etching and diagnostics
2006
Scott G. Walton
D. Leonhardt
Richard F. Fernsler
Keywords:
Electron temperature
Cathode ray
Etching
Plasma
Plasma etching
Reactive-ion etching
Atomic physics
Ion
Electron density
Materials science
Correction
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