A piezoelectric linear ultrasonic motor with the structure of a circular cylindrical stator and slider

A piezoelectric linear ultrasonic motor is proposed, with a cylindrical stator and slider structure. The length and diameter of the motor are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe. The stator is designed based on theoretical analyses and finite element method (FEM) simulation. The traveling wave propagation is obtained in the FEM simulation under the proper geometrical sizes, suitable boundary conditions and driving voltage signals. The trajectories of particles on the TFMG pipe are elliptical motion. In the experiment, a 25 μm thick TFMG pipe is fabricated using the rotating magnetron sputtering technique and the vibration characteristics of the stator are measured by a laser Doppler vibrometer (LDV) system. Bidirectional motion of the slider is observed around 600 kHz, the maximum velocity is near to 40 mm s −1 at 50 Vp-p for the loose slider and the maximum output force is 6 mN at 70 Vp-p for the tight slider. (Some figures in this article are in colour only in the electronic version)