Depth distribution of the mean losses of electron-beam energy in a sample: Application in problems of quantitative X-ray spectral microanalysis

A formula describing the depth dependence of the distribution of the mean energy of a electron beam in a solid target is obtained within the framework of the discrete model of the multiple scattering of charged particles in substances. It is verified whether this formula corresponds to experimental results, and the possibility of using it to solve practical problems of X-ray spectral microanalysis is shown.