Methods for improving the damage performance of fused silica polished by magnetorheological finishing
2017
The laser-induced damage threshold of fused-silica samples processed via magnetorheological finishing is investigated
for polishing compounds depending on the type of abrasive material and the post-polishing surface roughness. The
effectiveness of laser conditioning is examined using a ramped pre-exposure with the same 351-nm, 3-ns Gaussian
pulses. Finally, we examine chemical etching of the surface and correlate the resulting damage threshold to the etching
protocol. A combination of etching and laser conditioning is found to improve the damage threshold by a factor of ~3,
while maintaining <1-nm surface roughness.
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