Colloidal Crystal Templating of Two-Dimensional Ordered Macroporous SiCN Ceramics

In this study, two-dimensional (2D) ordered macroporous SiCN ceramics were prepared by infiltrating sacrificial colloidal silica (SiO2) templates with the low molecular weight preceramic polymer, polysilazane. This was followed by a thermal curing step, pyrolysis at 1250°C in a N2 atmosphere, and finally the removal of the templates by etching with diluted HF. In particular, 100large-scale monolayer silica crystals were prepared on the cleaned Si substrates by spin coating. Two-dimensional SiCN ordered pore arrays were fabricated by a solution-dipping template strategy.