Preparation of Thermochromic VO2 Thin Films on Fused Silica and Soda-lime Glass by RF Magnetron Sputtering

The VO2 thin films were deposited on fused silica and soda-lime glass by RF magnetron sputtering and characterized by X-ray diffraction (XRD) and BIORAD FTS 6000 spectrometer. The influence of stress on the phase transition temperature and shape was also discussed.