Wurtzite Structure High Mg Content ZnMgO Thin Films Deposited by Oxygen-Plasma Enhanced Pulsed Laser Deposition
2008
Wurtzite structure ZnMgO thin films with the energy gap (E g ) of 4.2 eV were deposited by oxygen-plasma enhanced
pulsed laser deposition (PEPLD) on quartz glass. Oxygen-plasma increases the Zn content in ZnMgO thin film, which
induced the evolution from cubic to hexagonal structure. The effects of target-substrate (T-S) distance on the band gap
and crystal quality of ZnMgO thin film deposited by PEPLD were studied by transmittance spectra and Raman. The
band gap of ZnMgO increased from 3.84 eV to 4.03 eV and the crystal quality decrease gradually when the T-S distance
decreased from 9 cm to 5 cm.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI