A two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending polymer hinges

In this paper, we report a new two-axis micro scanning mirror (WIMSM) using torsional and bending BoPET (biaxially-oriented polyethylene terephthalate) hinges. With a torsional hinge, the fast axis has a resonance frequency of 265 Hz in air and 172 Hz in water. With a torsional hinge, the fast axis has a resonance frequency of 265 Hz in air and 172 Hz in water. With a bending hinge, the slow axis has a resonance frequency less than 1 Hz. When the two axes are driven at their resonance frequencies, a dense raster scanning pattern with a maximal scanning range is obtained. For demonstration, 3D volumetric ultrasound microscopy in water is conducted with the new WIMSM.