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Selective Deposition of Ultrathin Poly(p‐xylene) Films on Dielectrics Versus Copper Surfaces
Selective Deposition of Ultrathin Poly(p‐xylene) Films on Dielectrics Versus Copper Surfaces
2004
Jay J. Senkevich
C.J. Wiegand
G-R. Yang
T.-M. Lu
Keywords:
Materials science
Thin film
Dielectric
Polymer
Inorganic chemistry
Monolayer
Copper
Metallizing
p-Xylene
Xylene
Contact resistance
Correction
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