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LID Reduction of c-Si Solar Cells with SiCN:H Deposited by PECVD
LID Reduction of c-Si Solar Cells with SiCN:H Deposited by PECVD
2013
Jochen Rentsch
M. Hofmann
Pierre Saint-Cast
A. Madec
J. Hong
F. Gouhinec
A. Zauner
F. Coeuret
Yves Marot
S. Pouliquen
Keywords:
Photochemistry
Materials science
Plasma-enhanced chemical vapor deposition
Optics
Optoelectronics
Correction
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