COMPUTATIONAL STUDIES OF PLASMA GENERATION AND CONTROL IN A MAGNETRON SPUTTERING SYSTEM

The problems in plasma generation and erosion profiles are studied by tracing an electron in a cylindrical magnetron sputtering system with a ferromagnetic target. The magnetic field is analyzed using the finite-element method (FEM). The magnetic fields in the basic reference model are generated by a permanent magnet in the center and a yoke of soft iron around the central permanent magnet. First, the yoke is moved to change the erosion profiles. Second, the permanent magnet replaces the yoke. In both systems, the erosion profiles and the configuration of the magnetic field are examined when the yoke and the magnet in the outer are moved.