Transparent hard coatings deposited by a combined HIPIMS/CFUBMS deposition technique

Bo-Huei Liao,Chien Nan Hsiao,Ming-Hua Shiao,Sheng-Hui Chen

Transparent hard coatings deposited by a combined HIPIMS/CFUBMS deposition technique

2016

Bo-Huei Liao
Chien Nan Hsiao
Ming-Hua Shiao
Sheng-Hui Chen

SiON films are prepared by a combined high-power impulse and closed field magnetron sputtering deposition technique. A 5-layer AR coating is deposited on one side glass. Its average transmittance is 93.2 % and its hardness is larger to 19 Gpa.

Keywords:

Deposition (law)
Transmittance
High-power impulse magnetron sputtering
Scanning electron microscope
Sputter deposition
Thin film
Refractive index
Anti-reflective coating
Composite material
Metallurgy
Materials science

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