Surface-enhanced Raman scattering with gold-coated silicon nanopillars arrays: the influence of size and spatial order

Abstract Nanopillars have been extensively explored as promising substrates for surface-enhanced Raman scattering (SERS) owing to their high sensitivity and excellent reproducibility. Most of the researches have been focused on the fabrication methods of nanopillars, and the dependences of SERS effects on geometrical size and spatial order are rarely investigated. In this work, SERS properties of nanopillars with different sizes (115–185 nm) and spatial orders (square and rhombus orders) have been studied. The work has shown that the nanopillars not only have high enhancement capability and high signal reproducibility, but also the enhancement is insensitive to the size and spatial orders. The measured enhancement factors (EFs) are 2.3–4.0×106 and signal reproducibility (relative standard deviation, RSD) are ∼5.2%–6.9%, which are among the best of the similar SERS substrates reported. The variation of SERS intensity was as low as approximately 4.8% with the variation of pillar size from 115, 135, 145, to 160 nm. The insensitiveness and high reproducibility have been ascribed to the combined excitation of localized surface plasmon resonance (LSPR) and propagating surface plasmons (SPPs) of the nanopillars. Optical properties of the nanopillars are studied both experimentally and numerically to understand the physics behind the SERS performance.