Semiquantitative analysis of alloys with SIMS

Exposure of metallic samples to oxygen during SIMS analysis is known to enhance and stabilize the sputter ion yields of metallic elements. SIMS data are obtained for specific Ni and Al base alloys as well as for the pure standards Al, Si, Ti, Cr, Co, Fe, and Ni. These data are compared with Auger and bulk analyses of the alloys. Comparisons show that semiquantitative analysis of metallic elements in these alloys can be performed with SIMS if oxygen enhancement is employed. Differences between the SIMS and Auger analyses are related to the sputtering and other processes.