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Evaluation of the Surface Properties of a PVA Brush for Cleaning Semiconductor Wafer by AFM in Liquids.
Evaluation of the Surface Properties of a PVA Brush for Cleaning Semiconductor Wafer by AFM in Liquids.
2019
Takahiko Ikarashi
Takumi Yoshino
Kazuki Miyata
Keisuke Miyazawa
Megumi Uno
Chikako Takatoh
Takeshi Fukuma
Keywords:
Optoelectronics
Wafer
Atomic force microscopy
Brush
Materials science
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