Thin film bulk acoustic wave resonator and filter technology

This paper presents a short summary of progress made in the development of thin film resonators and filters. Over 300 different filter and resonator products have been developed spanning a frequency range of 500 MHz to over 12 GHz. While most of these products are custom designed for Government and commercial customers a number of filters and resonators are sufficiently generic to be discussed at this conference. All products share common issues of bandwidth, packaging, manufacturing, reliability, and temperature coefficients. Specific examples are given of resonators or filters designed and produced for commercial GPS and other markets.