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NANOMETER-SCALE SCRATCHING ON THE SINGLE-CRYSTAL SILICON SURFACE USING AN ATOMIC FORCE MICROSCOPE
NANOMETER-SCALE SCRATCHING ON THE SINGLE-CRYSTAL SILICON SURFACE USING AN ATOMIC FORCE MICROSCOPE
1999
Y. Ichida
K. Takahashi
Keywords:
Nanometre
Conductive atomic force microscopy
Magnetic force microscope
Single crystal
Atomic force microscopy
Analytical chemistry
Materials science
Silicon
Kelvin probe force microscope
single crystal silicon
Optoelectronics
Scratching
Correction
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