Analysis of the Output Displacement Characteristics of Piezoelectric Actuator

The experiment on the piezoelectric actuator used on the micro-isolation vibration plate has been carried out and the nonlinear curves of the displacement hysteresis have been obtained.The characteristics of the output displacement curves of the piezoelectric actuator have been overviewed and the displacement mechanism of the piezoelectric actuator has been analyzed in a microcosmic way.The results indicate that the output of the actuator has some vestigial displacement when the creep makes the driving voltage of the actuator return-to-zero;the nonlinearity and hysteresis of the piezoelectric ceramic actuators not only have relations with the prepared pressure,but also have something to do with the number of times of the added voltage and the frequency of the added voltage.The output curves have certain drift characteristics thus brings some difficulties for the accurate modeling of the piezoelectric actuator.The results provide a scientific basis to further correct and reduce the modelling error and improve the control accuracy.