Automation of engineering lot split-less for research and development fab

Recently the market demands quick turn around time (TAT) to highly advanced R&D fab. The analysis on the lot TAT in our fab showed that the time for engineering lot split at ion implantation process reached to about 7.2% of the total lot TAT. The automation to enable split-less engineering lot at ion implantation could reduce the operation time in R&D fab. Engineering lot split-less systems could reduce the operation time with lot split operation by 3/4 for ion implantation. This system consists of manufacturing execution system (MES), master maintenance system (MMS), and engineering management system (EMS). This realized the 24 hours automated transfer of Engineering lot without any lot split operations.