Design and Analysis of Thin Micro-Mechanical Suspended Dielectric RF-MEMS Switch for 5G and IoT Applications

5G systems provide a large mobile network capacity with higher video resolution, higher data rates as compared to 4G wireless network systems offered. Radio frequency-based Micro-Electro-Mechanical System (RF-MEMS)-based devices can enable various front end functions, non-reciprocity, filtering, radiation and equalization with small size, weight and better performance for IoT and 5G applications.. RF-MEMS based devices have widely grown over the last two decades due to their low power consumption, low loss and superior performances. RF-MEMS switch is mostly used for signal processing functions in microwave and RF circuits. In this paper, a switch is designed with a square plate of polysilicon with silicon nitride as dielectric. A DC voltage is applied to the design, which is greater than pull in voltage across the structure of switch. Penalty-based contact force is applied to the design, which makes the bridge comes in contact with dielectric. The structure showed spatial dependence on total displacement. The capacitance increased by a factor of 55 approximately.