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Comparative Study of Tungsten Films Grown By Atomic Layer Deposition with Newly Synthesized Metalorganic and Halide Precursor
Comparative Study of Tungsten Films Grown By Atomic Layer Deposition with Newly Synthesized Metalorganic and Halide Precursor
2021
Sangkyu Sun
Yujin Lee
Seung Gi Seo
Taewook Nam
Hyun Ho Lee
Hwi Yoon
SangHun Lee
Hyung Jun Kim
Keywords:
Inorganic chemistry
Halide
Tungsten
Atomic layer deposition
Materials science
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