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Ag film etching by using halogen gas plasma
Ag film etching by using halogen gas plasma
2017
Kenichi Yoshikawa
Atsuki Asano
Yudai Miyawaki
Kazuhito Furumoto
Toshiyuki Sasaki
Keisuke Kikutani
Hisataka Hayashi
Makoto Sekine
Masaru Hori
Keywords:
Dry etching
Reactive-ion etching
Halogen
Plasma
Etching
Plasma etching
Materials science
Inorganic chemistry
Correction
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