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Efficient simulation of the effect of random metrology errors on a sparse aperture system
Efficient simulation of the effect of random metrology errors on a sparse aperture system
2003
F. Tasker
B. Plourde
L. Palecki
A Reed
Keywords:
Transfer function
Metrology
Electronic engineering
Engineering
Error detection and correction
Optical imaging
Fast Fourier transform
Aperture
optical control
error analysis
Correction
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