Development of new magnets for a microwave ion source

A microwave ion source is a long-life ion source because it has few expendable items. Therefore, it can have various applications in the industrial and medical fields, such as ion implantations in semiconductors and particle therapies. In this paper, we report on the design of new electromagnets that consist of three electromagnets, namely, iron yokes and permanent magnets, to produce highly charged ions and ions from molecules with strong chemical bonds. These electromagnets can generate both the so-called off-resonance and electron-cyclotron resonance conditions by tuning the currents in each coil. Permanent magnets are used to generate cusp magnetic field.