A Nonlinear FEM Model to Calculate Third-Order Harmonic and Intermodulation in TC-SAW Devices

Nonlinearities in Temperature Compensated SAW (TC-SAW)devices in the 2 GHz range are investigated using a nonlinear finite element model by simultaneously considering both third-order intermodulation distortion (IMD3)and third harmonic (H3). In the employed perturbation approach, different contributions to the total H3, the direct and indirect contribution, are discussed. H3 and IMD3 measurements were fitted simultaneously using scaling factors for SiO 2 film and Cu electrode nonlinear material tensors in TC-SAW devices. We employ a P-Matrix simulation as intermediate step: Firstly, measurement and nonlinear P-Matrix calculations for finite devices are compared and coefficients of the P-Matrix simulation are determined. The nonlinear tensor data of the different materials involved in periodic nonlinear finite element method (FEM)computations are optimized to fit periodic P-Matrix calculations by introducing scaling factors. Thus, the contribution of different materials to the nonlinear behavior of TC-SAW devices is obtained and the role of materials is discussed.