Three-dimensional laser machining of structural ceramics

Abstract Three- dimensional laser machining of structural ceramics such as alumina (Al 2 O 3 ), silicon nitride (Si 3 N 4 ), silicon carbide (SiC) and magnesia (MgO) was carried out using a 1.06 μm wavelength pulsed Nd:YAG laser. The rate of machining predicted in terms of material removed per unit time (mg/s) increased with an increase in heating rate (K/s). A thermal model based on temperature dependent absorptivity and thermophysical properties, in addition to conduction, convection and radiation based heat transfer, was developed to predict material removal rate. Predicted values were compared with actual measurements made from machined cavities. Such a study would enable advance predictions of the laser processing conditions required to machine cavities of desired dimensions.