Dependence of optical properties of vanadium oxide films on crystallization and temperature

Abstract The optical properties of V 2 O 5 and VO 2 films prepared by a radio frequency sputtering were investigated using spectroscopic ellipsometry and measurement of transmittance. It was confirmed that the spectra of the complex refractive index of the V 2 O 5 films are greatly affected by variations in crystalline structure. The spectra of the complex refractive index of the VO 2 film showed remarkable change near transition temperature. This result indicates that the metal–insulator transition (MIT) in the VO 2 film occurs around 68 °C, and the MIT is confirmed by measurement of the transmittance with temperature.