Performance envelope of adiabatic logic circuits based on electrostatic NEM switches

The performance envelope, i.e. energy vs. frequency, of adiabatic logic circuits based on nanoelectromechanical (NEM) switching elements will be explored. It will be shown that the contact resistance and the mechanical commutation time of the NEM switches dictate the performance envelope of such circuits. Approximate analytical expressions will be derived based on a reduced order model (ROM) of the switch; the results obtained from this approximate model will be compared to results obtained from experimental characterization of electrostatic MEMS switches. To the authors' best knowledge this is the first publication that looks into the details of adiabatic logic circuits based on electromechanical switches.