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Investigation of forming nanoclusters of germanium and silicon — germanium solid in LPCVD process
Investigation of forming nanoclusters of germanium and silicon — germanium solid in LPCVD process
2014
A. A. Kovalevsky
A. S. Strogova
N. S. Strogova
V. M. Borisevich
Keywords:
Chemical vapor deposition
Electronic engineering
Nanoclusters
Physics
Germanium
Silicon-germanium
Molecular physics
Metallurgy
Optoelectronics
Optics
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