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Defect-free Isolation on High-Thermal-Conductivity SOI Substrates for Complementary BiCMOS Technology
Defect-free Isolation on High-Thermal-Conductivity SOI Substrates for Complementary BiCMOS Technology
2009
K. Van Wichelen
Patrick Ong
Alain Moussa
D. Radisic
K. Devriendt
Sandip Halder
Karine Kenis
W. Lee
Bart Vandevelde
C. Soonekindt
S. A. Hadi
T. Smet
S. Van Huylenbroeck
S. Decoutere
M. Seacrist
M. Ries
V. Drobny
R. Wise
Keywords:
BiCMOS
Thermal conductivity
Silicon on insulator
Electronic engineering
Materials science
Optoelectronics
defect free
bicmos technology
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