4K×4K format 10μm pixel pitch H4RG-10 hybrid CMOS silicon visible focal plane array for space astronomy

Teledyne’s silicon hybrid CMOS focal plane array technology has matured into a viable, high performance and high- TRL alternative to scientific CCD sensors for space-based applications in the UV-visible-NIR wavelengths. This paper presents the latest results from Teledyne’s low noise silicon hybrid CMOS visible focal place array produced in 4K×4K format with 10 μm pixel pitch. The H4RG-10 readout circuit retains all of the CMOS functionality (windowing, guide mode, reference pixels) and heritage of its highly successful predecessor (H2RG) developed for JWST, with additional features for improved performance. Combined with a silicon PIN detector layer, this technology is termed HyViSI™ (Hybrid Visible Silicon Imager). H4RG-10 HyViSI™ arrays achieve high pixel interconnectivity (<99.99%), low readout noise (<10 e- rms single CDS), low dark current (<0.5 e-/pixel/s at 193K), high quantum efficiency (<90% broadband), and large dynamic range (<13 bits). Pixel crosstalk and interpixel capacitance (IPC) have been predicted using detailed models of the hybrid structure and these predictions have been confirmed by measurements with Fe-55 Xray events and the single pixel reset technique. For a 100-micron thick detector, IPC of less than 3% and total pixel crosstalk of less than 7% have been achieved for the HyViSI™ H4RG-10. The H4RG-10 array is mounted on a lightweight silicon carbide (SiC) package and has been qualified to Technology Readiness Level 6 (TRL-6). As part of space qualification, the HyViSI™ H4RG-10 array passed radiation testing for low earth orbit (LEO) environment.