Safety detection type chemical liquid supply device

(57) [Summary] (Modifications) [PROBLEMS] To provide a device that can automatically and stably and automatically supply a dangerous chemical used in a wafer cleaning process in a semiconductor manufacturing facility. . SOLUTION: In a chemical liquid supply device, a gas for pressure feeding such as high-purity nitrogen gas is fed into a tank for pressure-feeding chemical liquid, and the gas pressure is used to send out the liquid chemical from the tank and supply it to a use point. Providing a gas flow rate detecting means and a gas pressure detecting means, and providing an automatic opening / closing valve on a gas supply pipe and a chemical solution delivery pipe, controlling the automatic opening / closing valve based on the flow rate of the gas for pumping and the detection data of the pressure. Then, the supply of the chemical solution was stopped. Gas flow, Automatically measures gas pressure and automatically records the data, calculates the average and variance from each measured data, compares the average with the latest data, generates an abnormal signal, and stops supplying the chemical solution I did it.